TG-F1170-E00

Jan 2020

1st edition

K

Controller with an Ultrasonic Flow Converter

for Compact System Design

FC6000 Series

Flow Control System

OUTLINE

The

FC6000 series is a separate-type flow controller system

which enables a compact system design.

It consists of control valve, flow detector, and flow controller.

The FCA6000 series flow rate controller integrates highly

accurate ultrasonic flowmeter.

• Control valve: FCV series

• Flow detector: UCUF series

• Flow rate controller: FCA6000 series

The

FC6000 series can control a wide range of flow rates with

an extensive lineup of flow rate detectors and control valves.

Also, higher safety and greater freedom in layout can be

realized by separating the measurement and control part from

the process fluid part, such as the flow detector and the control

valve.

The reliable FC6000 series is best suited for handling chemical

liquids such as in semiconductor processes which require

highly accurate flow rate control.

FEATURES

❏ Improved bubble resistance and flow measurement

The conventional ultrasonic flowmeters used to have

difficulties in measuring fluids containing bubbles because

the bubbles disturb the propagation of ultrasound waves.

The FCA6000 series uses our unique, proven signal

processing technology, which makes it possible to measure

the flow even when the bubbles contain.

Furthermore, by detecting and removing abnormal outputs

based on our extensive field experience, bubble resistance

has been greatly improved, as well as measurement stability

of the flowmeter.

❏ Enhanced safety and freedom in layout

The flow detector and the control valve in the process

fluid part are separated from the measurement and

control part, ensuring enhanced protection against liquid

leakage as well as greater freedom in layout.

❏ Support for a wide flow range

The FCA6000 series covers a wide range of flow rate, from a

minimum of 2.5 to 25 mL/min up to 1 to 10 L/min.

❏ Low power consumption

The FCA6000 series consumes less current than existing

converters.

❏ CE marking

Complies with EU EMC, RoHS2, and low voltage requirements

(EMC standards: EN61326-1:2013, EN61326-2-3:2013)

❏ High corrosion resistance

The UCUF series uses highly corrosion resistant PFA and

PTFE for the wetted parts and can be used to handle

chemical liquids in the semiconductor and other industries.

MAIN APPLICATIONS

❏ Flow rate setting for chemical liquids and DIW

By installing the FCA6000 series in the supply line for various

chemical liquids, which was previously controlled by a

metering pump or pressure feed tank, high accurate and

stable supply control is possible.

❏ Concentration control

The control units installed in chemical liquid and pure water

lines enable stable concentration management when diluting

the chemical liquids with pur e water to keep the

concentration at a certain level.

❏ Flow control of branch lines

The control units installed in each line branched from the

main line enable a stable flow rate to be maintained without

mutual interference between the lines.