698A datasheet(2/4 Pages) MKS

2 / 4 page

S = Standard accuracy for particular range/calibration. O = Optional accuracy for particular range/calibration.

Notes:

(1) 0.15% of Reading and 0.25% of Reading accuracies on 698 sensors are for bidirectional calibrations.

(2) For differential sensors: overpressure limits specified in above table are only for Px > Pr. For reverse overpressure (Pr > Px) on differential sensors, overpressure limit is 125% of F.S.

690A

11T

Pressure

ranges

(mmHg F.S.)

resolution

(of F.S.)

Accuracy

% of rdg.

(± temp. coeff.)

Useable

Measurement

range

(F.S. to)

Temp.

Coefficients

Volume

(cc)

Maximum

Over-

pressure

Maximum

line

Pressure

Operating

Temperature

range (°C)

Materials Exposed

to gases

Fittings

Zero

(F.S.°C)

Span

(Rdg. °C)

0.1

1 x 10-6

S: 0.12%

2-3 x 10-5

30 ppm

100 ppm

2.5

N/A

40 psia

N/A

15° - 40°C

Inconel,

Stainless

Steel

N/A

Swagelok®

4 VCR®

O: 0.08%

1 x 10-5

30 ppm

100 ppm

100

1000

1 x 10-6

S: 0.12%

2-3 x 10-5

15 ppm

20 ppm

2.5

N/A

45 psia

N/A

temperature

regulated

at 45°C

O: 0.08%

1 x 10-5

4 ppm

20 ppm

O: 0.05%

1 x 10-5

4 ppm

20 ppm

5000

10000

15000

20000

25000

1 x 10-6

S: 0.12%

O: 0.08%

2-3 x 10-5

1 x 10-5

15 ppm

20 ppm

N/A

125% F.S.

N/A

4 ppm

20 ppm

0.1

1 x 10-6

S:0.12%

2-3 x 10-5

30 ppm

100 ppm

3.5

40 psid2)

150 psig

15° - 40°C

Inconel,

Stainless

Steel

Inconel,

Stainless

Steel,

Alumina,

Palladium

Glass

Swagelok

4 VCR

O: 0.08%

1 x 10-5

30 ppm

100 ppm

100

1000

1 x 10-6

S: 0.12%

2-3 x 10-5

15 ppm

20 ppm

O: 0.15%(1)

1 x 10-5

4 ppm

20 ppm

3.5

45 psid(2)

150 psig

temperature

regulated

at 45°C

S: 0.25%

1 x 10-5

4 ppm

20 ppm

O: 0.08%

1 x 10-5

4 ppm

20 ppm

O: 0.05%

1 x 10-5

4 ppm

20 ppm

698A Differential

690A Absolute

MKS

BArATrOn

Dimensional Drawing —

690 and 698

Note: Unless otherwise specified, dimensions are

nominal values in inches (mm referenced).

698A

698A Ordering Code Example: 698A11TrC

Code

Configuration

698 differential Pressure Sensor

698A

Pressure range (mmHg)

0.1 mmHg

.1T

1 mmHg

01T

10 mmHg

11T

100 mmHg

12T

1000 mmHg

13T

Fittings

Swagelok 4 VCR female

Accuracy

Unidirectional Calibration

±0.12% of Reading

±0.08% of Reading

±0.05% of Reading (1-1000 mmHg ranges only)

Bidirectional Calibration

±0.25% of Reading (1-1000 mmHg ranges only)

±0.15% of Reading (1-1000 mmHg ranges only)

Ordering Information

690A Ordering Code Example: 690A11TrC

Code

Configuration

690 Absolute Pressure Sensor

690A

Pressure range (mmHg)

0.1 mmHg (690 only)

.1T

1 mmHg

01T

10 mmHg

11T

100 mmHg

12T

1000 mmHg

13T

5000 mmHg

53T

10,000 mmHg

14T

15,000 mmHg

RBT

20,000 mmHg

24T

25,000 mmHg

RCT

Fittings

Swagelok 4 VCR female

Accuracy

±0.12% of Reading

±0.08% of Reading

±0.05% of Reading (1-1000 mmHg ranges)

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