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274 Datasheet(PDF) 2 Page - MKS Instruments.

Part # 274
Description  Good vacuum pressure measurement for economical cost
PDF  8 Pages
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

274 Datasheet(HTML) 2 Page - MKS Instruments.

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Figure 1 —
Operating Range for Bayard-Alpert Ionization Gauge Tube
Description
Bayard-Alpert (hot cathode) gauges provide pressure
measurement based on the ionization of gas molecules by
a constant flow of electrons from a filament. The number
of ions created is directly proportional to the density of
molecules. The ions are collected and measured by a
vacuum gauge controller and converted to pressure based
on the sensitivity of the gauge. The Series 274 Bayard-
Alpert gauges consist of 3 types: glass tubulated, nude
gauge with electron bombardment degas (EB), and the
nude gauge with I2R degas (resistive).
Gas Species Effects
Bayard-Alpert ionization gauges have different relative
sensitivities for different gas species. As a result, pressure
readout provides a direct reading only for the gas for which
the gauge is specified (nitrogen). This is called a readout
of nitrogen equivalent pressure. A simple mathematical
conversion of the direct pressure readout to the pressure
of the non standard gas can be made. This conversion is
made using the relative gauge sensitivity for the specific
gas. These sensitivities are tabulated in reference material
and are contained in the Granville-Phillips® instruction
manual for Series 274.
Hot filament type ionization vacuum gauges work best in
given pressure ranges for individual gauge designs. The
following is a brief outline of the considerations relevant to
selection of the proper gauge.
A glance at the chart (Figure 1) will quickly indicate the
gauge or gauges suitable for a given application. The
useful range of most of these gauges starts at 2 x 10-2
Torr. Variations in design permit operation to various orders
of vacuum. The nude type 274022, 274023, 274041 and
274042 are suitable to 2 x 10-11 Torr.
Operating Principle
negative electrons are emitted at a well-controlled,
selectable rate from a heated filament and are accelerated
toward a positively charged wire grid (anode). Electrons
pass into the space between the grid and a collector
wire at ground. In this space the electrons collide with
gas molecules from the vacuum system, producing
positive ions. The positive ions are then collected by the
grounded collector wire that is located along the axis of the
cylindrical grid. At a constant filament to grid voltage and
electron emission current, the rate that positive ions are
formed is directly proportional to the density of molecules
(pressure) in the space for pressures below 1 x 10-3 Torr.
The strength of the ion current is then indicated on a
microammeter that is calibrated in units of pressure.
The low end of the operating range of a Bayard-Alpert
gauge is determined by the X-ray limit of this type of
gauge. The X-ray limit varies with different gauge designs.
Features & Benefits
• Goodvacuumpressuremeasurementforeconomical
cost
• Operatesonindustrystandardelectrodevoltagesand
wide range of electron emission currents
(10
mA to 10 mA)
• Well-knownperformancecharacteristicsinvacuum
industry
• Ioncollectorelectrodewell-shieldedfromleakage
currents
• Availablewithburn-outresistantfilamentsandstandard
vacuum connections
• Allunitscanbedegassedbyelectronbombardment;
some can be resistance degassed
X-rays are produced when the electrons emitted by the
filament impact the grid and support wires. Because of
the geometry of the Bayard-Alpert gauge, only a small
fraction of the emitted X-rays are intercepted by the ion
collector. When the X-rays strike the collector wire they
cause electrons to be photoelectrically ejected from the
collector. This X-ray current limits the pressures that can
be measured, and is equivalent to a pressure reading in
the 10-10 or 10-11 Torr ranges, depending upon the gauge
model. The X-ray limit refers to the lowest pressure
indication that may be obtained in a gauge when all the
output current is due to X-ray induced photoemission and
there is an absence of gas.
The X-ray limit will be increased as a result of hydrocarbon
contamination of the electrodes, since contaminated
surfaces release more secondary electrons under X-ray
bombardment. Such contamination can generally be
removed by thorough degassing of the electrodes.



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