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274 Datasheet(PDF) 2 Page - MKS Instruments. |
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274 Datasheet(HTML) 2 Page - MKS Instruments. |
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2 / 8 page ![]() Figure 1 — Operating Range for Bayard-Alpert Ionization Gauge Tube Description Bayard-Alpert (hot cathode) gauges provide pressure measurement based on the ionization of gas molecules by a constant flow of electrons from a filament. The number of ions created is directly proportional to the density of molecules. The ions are collected and measured by a vacuum gauge controller and converted to pressure based on the sensitivity of the gauge. The Series 274 Bayard- Alpert gauges consist of 3 types: glass tubulated, nude gauge with electron bombardment degas (EB), and the nude gauge with I2R degas (resistive). Gas Species Effects Bayard-Alpert ionization gauges have different relative sensitivities for different gas species. As a result, pressure readout provides a direct reading only for the gas for which the gauge is specified (nitrogen). This is called a readout of nitrogen equivalent pressure. A simple mathematical conversion of the direct pressure readout to the pressure of the non standard gas can be made. This conversion is made using the relative gauge sensitivity for the specific gas. These sensitivities are tabulated in reference material and are contained in the Granville-Phillips® instruction manual for Series 274. Hot filament type ionization vacuum gauges work best in given pressure ranges for individual gauge designs. The following is a brief outline of the considerations relevant to selection of the proper gauge. A glance at the chart (Figure 1) will quickly indicate the gauge or gauges suitable for a given application. The useful range of most of these gauges starts at 2 x 10-2 Torr. Variations in design permit operation to various orders of vacuum. The nude type 274022, 274023, 274041 and 274042 are suitable to 2 x 10-11 Torr. Operating Principle negative electrons are emitted at a well-controlled, selectable rate from a heated filament and are accelerated toward a positively charged wire grid (anode). Electrons pass into the space between the grid and a collector wire at ground. In this space the electrons collide with gas molecules from the vacuum system, producing positive ions. The positive ions are then collected by the grounded collector wire that is located along the axis of the cylindrical grid. At a constant filament to grid voltage and electron emission current, the rate that positive ions are formed is directly proportional to the density of molecules (pressure) in the space for pressures below 1 x 10-3 Torr. The strength of the ion current is then indicated on a microammeter that is calibrated in units of pressure. The low end of the operating range of a Bayard-Alpert gauge is determined by the X-ray limit of this type of gauge. The X-ray limit varies with different gauge designs. Features & Benefits • Goodvacuumpressuremeasurementforeconomical cost • Operatesonindustrystandardelectrodevoltagesand wide range of electron emission currents (10 mA to 10 mA) • Well-knownperformancecharacteristicsinvacuum industry • Ioncollectorelectrodewell-shieldedfromleakage currents • Availablewithburn-outresistantfilamentsandstandard vacuum connections • Allunitscanbedegassedbyelectronbombardment; some can be resistance degassed X-rays are produced when the electrons emitted by the filament impact the grid and support wires. Because of the geometry of the Bayard-Alpert gauge, only a small fraction of the emitted X-rays are intercepted by the ion collector. When the X-rays strike the collector wire they cause electrons to be photoelectrically ejected from the collector. This X-ray current limits the pressures that can be measured, and is equivalent to a pressure reading in the 10-10 or 10-11 Torr ranges, depending upon the gauge model. The X-ray limit refers to the lowest pressure indication that may be obtained in a gauge when all the output current is due to X-ray induced photoemission and there is an absence of gas. The X-ray limit will be increased as a result of hydrocarbon contamination of the electrodes, since contaminated surfaces release more secondary electrons under X-ray bombardment. Such contamination can generally be removed by thorough degassing of the electrodes. |
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