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274 Datasheet(PDF) 3 Page - MKS Instruments. |
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274 Datasheet(HTML) 3 Page - MKS Instruments. |
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3 / 8 page ![]() Filaments All gauges listed in this brochure have either tungsten or thoria coated iridium cathodes. The relative advantages and disadvantages of each are tabulated in Figure 2. Sensitivity The sensitivity is defined as follows: This definition makes the sensitivity relatively independent of the electron current and dependent only on gauge construction. In practice, it is often necessary to determine the lowest pressure that can be read with a given gauge tube and controller. To determine this, the lowest readable current sensitivity of the electrometer portion of the controller must be known. Knowing the sensitivity of the gauge tube from the manufacturer’s data, the relationship for ionization current vs. pressure can be determined. Figure 2 — Filament Selection Guide Current measured in amperes. Pressure in Torr. Degassing To reduce the outgassing in a gauge to a negligible level, the process of degassing is employed. For attainment of the lowest pressure levels the glass envelope gauges should be baked at 400°C for 1 hour. The electrodes are degassed by heating to a temperature of 900°C nominally for approximately 15 minutes after baking. The electrode heating is accomplished by either electron bombardment (EB) or by passing a heavy current (I2R) at low voltage through the grid. In general, gauges equipped withbuiltupgrids;i.e.,squirrelcageorgridsweldedat multiple intersecting components, are degassed only by electron bombardment. The collector may be degassed only by the electron bombardment method. Grids consisting of a helix or double helix, in which both ends of the helix have external connections, are degassed by the heavy current method. All gauges with helical grids may also be degassed by means of electron bombardment. The 274022, 274023, 274041, 274042, 274050, 274057, and 274058 gauges utilize a squirrel cage grid and must use electron bombardment for degassing. To provide a nude gauge suitable for I2R degassing, the 274028, 274043, and 274053 gauges were developed. Electrical Leakage The accuracy of pressure measurement, which depends on the measurement of currents as low as nanoamperes and below, is affected by leakage. These paths may be classified as either internal or external. Internal and external leakage is held to the lowest possible value in designs such as the tubulated Bayard-Alpert. The collector terminal of the gauge is at the opposite end of the envelope from the grid and cathode terminals. Designs which bring the collector out as one of a series of pins in a base or header are more susceptible to leakage problems than the tubulated design. Internal leakage usually results from the evaporation of tungsten or thoria vapor from the cathode. This is controlled by means of a shield where the collector lead passes through the stem or header insulator. Great care must be exercised in insulating and shielding the lead to the collector terminal on the gauge from the controller. phenomenon tungsten Filament thoria-Iridium Filament Accidental Exposure to Atmosphere Do not Use High Tolerance High Oxygen Partial Pressure Easily Oxidized Relatively Immune to Oxidation Chemical Reaction with Gas to be Measured Higher Filament Temperature, High Reaction Rate Lower Filament Temperature, Lower Reaction Rate Corrosive Gas Tolerance Higher Lower |
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