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274 Datasheet(PDF) 3 Page - MKS Instruments.

Part # 274
Description  Good vacuum pressure measurement for economical cost
PDF  8 Pages
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

274 Datasheet(HTML) 3 Page - MKS Instruments.

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Filaments
All gauges listed in this brochure have either tungsten or
thoria coated iridium cathodes. The relative advantages
and disadvantages of each are tabulated in Figure 2.
Sensitivity
The sensitivity is defined as follows:
This definition makes the sensitivity relatively independent
of the electron current and dependent only on gauge
construction. In practice, it is often necessary to determine
the lowest pressure that can be read with a given gauge
tube and controller. To determine this, the lowest readable
current sensitivity of the electrometer portion of the
controller must be known.
Knowing the sensitivity of the gauge tube from the
manufacturer’s data, the relationship for ionization current
vs. pressure can be determined.
Figure 2 —
Filament Selection Guide
Current measured in amperes. Pressure in Torr.
Degassing
To reduce the outgassing in a gauge to a negligible level,
the process of degassing is employed. For attainment
of the lowest pressure levels the glass envelope gauges
should be baked at 400°C for 1 hour.
The electrodes are degassed by heating to a temperature
of 900°C nominally for approximately 15 minutes after
baking.
The electrode heating is accomplished by either electron
bombardment (EB) or by passing a heavy current (I2R) at
low voltage through the grid. In general, gauges equipped
withbuiltupgrids;i.e.,squirrelcageorgridsweldedat
multiple intersecting components, are degassed only by
electron bombardment. The collector may be degassed
only by the electron bombardment method. Grids
consisting of a helix or double helix, in which both ends of
the helix have external connections, are degassed by the
heavy current method. All gauges with helical grids may
also be degassed by means of electron bombardment.
The 274022, 274023, 274041, 274042, 274050, 274057,
and 274058 gauges utilize a squirrel cage grid and must
use electron bombardment for degassing. To provide
a nude gauge suitable for I2R degassing, the 274028,
274043, and 274053 gauges were developed.
Electrical Leakage
The accuracy of pressure measurement, which depends
on the measurement of currents as low as nanoamperes
and below, is affected by leakage. These paths may be
classified as either internal or external.
Internal and external leakage is held to the lowest possible
value in designs such as the tubulated Bayard-Alpert. The
collector terminal of the gauge is at the opposite end of the
envelope from the grid and cathode terminals.
Designs which bring the collector out as one of a series of
pins in a base or header are more susceptible to leakage
problems than the tubulated design.
Internal leakage usually results from the evaporation
of tungsten or thoria vapor from the cathode. This is
controlled by means of a shield where the collector lead
passes through the stem or header insulator. Great care
must be exercised in insulating and shielding the lead to
the collector terminal on the gauge from the controller.
phenomenon
tungsten Filament
thoria-Iridium Filament
Accidental Exposure
to Atmosphere
Do not Use
High Tolerance
High Oxygen
Partial Pressure
Easily Oxidized
Relatively Immune
to Oxidation
Chemical Reaction with
Gas to be Measured
Higher Filament Temperature,
High Reaction Rate
Lower Filament Temperature,
Lower Reaction Rate
Corrosive Gas Tolerance
Higher
Lower



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