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274 Datasheet(PDF) 4 Page - MKS Instruments. |
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274 Datasheet(HTML) 4 Page - MKS Instruments. |
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4 / 8 page ![]() Figure 3 — Operating Characteristics for Series 274 Ionization Gauge Tubes Pumping The ionization gauge exhibits a certain pumping capacity. This is due to both chemical and electrical effects. Chemical pumping is due, in general, to the affinity of gases for very clean surfaces. As the surface becomes saturated, the pumping action is diminished and reaches a steady state value. Readings for a typical glass tabulated gauge will be 20 to 50 percent lower during the period of chemical pumping. The duration of the pumping may be of the order of four hours at 1 x 10-9 Torr. Electronic or ionic pumping saturates after pumping approximately three months at 1 x 10-9 Torr. The most common remedy for pumping effects is to provide a passage of large conductance between the gauge and the vacuum system. A third mechanism of pumping in gauges involves chemical reactions with the hot cathode. A number of gases such as oxygen, nitrogen, water vapor, and hydrogen have been shown to react with the carbon present in tungsten. The ratio of these reactions are dependent on the cathode temperature, and are low enough that serious errors in measurement can be avoided when high-conductance connections are used. In small systems, however, the change in gas composition may be significant. Several gauge configurations are available to cope with the pumping phenomenon. The glass envelope gauge equipped with 3/4-inch tubulation, such as the 274002, has adequate conductance for use down to the 10-8 Torr range. A gauge for use down to the 10-10 Torr range is available with 1-inch tubulation (274015). To compensate for the high electronic pumping speed, all internally shielded gauges should be specified with 1-inch tubulations. nude gauges are the best solution to severe ionization gauge pumping problems. With the nude geometry, the gauge elements can be positioned directly into the vacuum chamber, thereby eliminating the pressure differential normally associated with a tubulated gauge. The time response of this gauge system is greatly reduced as compared to the tubulated gauge. Comparing the requirements of a given application to the items above will permit the selection of the most appropriate gauge for the purpose. |
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