901P datasheet(3/4 Pages) MKS

3 / 4 page

sensor

Type 1

MicroPirani (MEMS Thermal Conductivity)

Type 2

Piezo differential (MEMS diaphragm)

Measuring Range

Absolute

1.0 x 10-5 Torr to 1500 Torr

Differential

-760 to +760 Torr

set Point Range

Absolute

5.0 x 10-4 Torr to 1000 Torr

Differential

-760 to +100 Torr

Calibration Gas

Air, Argon, Helium, Nitrogen, H

2, H2O vapor, CO2, Xenon, Neon

Operating Temperature Range

0° to 40°C (32° to 104°F)

Maximum Bakeout Temperature

80°C (176°F), non-operating

digital Communication

RS485 / RS232 (4800 to 230400 Baud)

Controls

Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory

default, set point functions: value, hysteresis, direction, enable, transducer status,

switch, LED test

Status

Absolute and differential pressure reading, units, set point, operating time, transducer

temperature, user tag, model, device type, serial number, firmware and hardware

versions, part number, manufacturer

Analog Output (Absolute Pressure)

1 to 9 VDC, 1 VDC/decade, 100

W maximum output impedance

Analog Output Resolution

16 bit

Optional Analog Output 2

5 VDC = 0 Torr, 1 VDC/decade

(Piezo differential)

Analog Output 2 Resolution

12 bit

Relays (Optional Rs232 and Rs485)

901P - 3 relays SPDT

Relay Contact Rating

1 A @ 30VAC/DC, resistive

Relay Response

100 msec maximum

Power Requirements

9 to 30 VDC, < 1.2 watts max (RS232/RS485)

9 to 30 VDC, < 2 watts max (EtherCAT)

MicroPirani

Accuracy(1)

5 x 10-4 to 1 x 10-3 Torr ±10% of Reading

1 x 10-3 to 100 Torr ±5% of Reading

100 Torr to Atm ±25% of Reading

Repeatability(1)

1 x 10-3 to 100 Torr ±2% of Reading

Piezo differential

Accuracy Piezo(1)

-10 to +10 Torr ±10% of Reading

-100 to -10 Torr ±8% of Reading

-760 to -100 Torr ±1% of Reading

+10 to 100 Torr ±5% of Reading

Repeatability(1)

-760 to +10 Torr ±1% of Reading

Zero Stability(1)

±0.1% of Full Scale (F.S. = 760 Torr)

Overpressure Limit

1500 Torr (Absolute)

Electrical Connectors

RS232/RS485/Analog

15-pin D-subminiature male

EtherCAT

Analog

15-pin D-subminiature male

EtherCAT

Two (2) RJ45 female receptacles for incoming and network signals

Installation Orientation

Any

Internal Volume (kF16)

2.8 cm3

Materials Exposed to Vacuum

Silicon, SiO

2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton

Electronic Casing and Flange

304 stainless steel

Weight (with kF 16 Flange)

170 g

Compliance

CE, ETG.5003.2080 Vacuum Pressure Gauge

(1) Accuracy and repeatability are typical values measured with Nitrogen gas at ambient temperature after zero adjustment.

Specifications

901P Datasheet(PDF) 3 Page - MKS Instruments.

901P Datasheet(HTML) 3 Page - MKS Instruments.

Html Pages

1 2 3 4

Datasheet Download

Link URL