Series 901P

MICROPIRAnI™ / PIEzO LOAd LOCk TRAnsduCER

Designed specifically for the load lock environment, the Series 901 Plus (901P) Load Lock

Transducer (LLT) combines Piezo and MicroPirani™ sensor technologies. The combined

output provides significantly higher accuracy, stability, repeatability and a faster response

time than conventional thermal conductivity gauges. The 901P combines both absolute

and differential pressure measurement technologies to provide superior performance and

functionality. The 901P provides patented, gas independent absolute pressure measurement

from 50 -1000 Torr with increased accuracy over thermal conductivity sensors.

Features & Benefits

• Functionalityofthreesensorsinasingle

transducer for space savings and wide

measurement range

• Ultracompactdesign

• Accurateabsolutepressuremeasurement

• Gasindependentabsolutepressure

measurement from 50 to 1,000 Torr

• Accurateatmosphericpressurereading,

independent of gas type and barometric

pressure changes

• Fast,accurateandrepeatablepressure

measurements reduces process cycle

time

• Mountableinanyorientationforeaseof

installation; no loss of measurement

accuracy

• Optionalintegratedtouch-screendisplay

available for local pressure indication, etc.

resistant to damage from air inrush or

vibration

• Threesetpointswithfastresponsetime

for reliable process control (optional)

• Easeofoperationviaanalogoutput,

RS232, RS485, and EtherCAT

• Setup,diagnosticandoperationsoftware

available

• Alternateanalogoutputandelectrical

connectors available to match other

vendors’ gauges and facilitate an easy

upgrade

Applications

The 901P has been specifically designed

for pressure measurement within a vacuum

load lock. It has the capability to replace

multiple pressure measurement devices

on a load lock with its absolute pressure

and atmospheric switching capabilities.

Subsequently OEMs can reduce costs with

a simplified load lock design. The 901P

can be used on load locks or any vacuum

chamber requiring both absolute pressure

measurement and atmospheric switching

capabilities.

Compared to gauges used in traditional

load lock designs, the 901P accurate

atmospheric pressure measurement can

improve load lock performance by faster

cycle times and prevent contamination of

load lock with atmospheric air.