Description

The Series 970B family consists of 3 models, the 971B,

972B and the 974B.

971B UniMag

The 971B UniMag transducer offers a measurement

cathode inverted magnetron sensor technology. The 971B

is a cost effective solution for base pressure measurement

and control.

972B DualMag

The 972B DualMag transducer offers a measurement

and it combines cold cathode inverted magnetron

and MicroPirani thermal conductivity MEMS sensor

technologies. The MicroPirani automatically controls the

cold cathode sensor to ensure optimal ignition pressure.

The MicroPirani offers 1-2 decades lower measuring range

thanatraditionalpiranigauge,subsequentlybylowering

the cold cathode activation pressure gauge, reliability is

improved and the service interval extended.

974B QuadMag

The 974B QuadMag offers a measurement range from

magnetron, MicroPirani and Piezo differential sensor

technologies. The 974B has been specifically designed

for pressure measurement within a vacuum loadlock. It

has the capability to replace multiple pressure

measurement devices on a loadlock with its absolute

atmosphericswitchingcapabilities.Subsequently,OEM’s

can reduce costs with a simplified loadlock design. The

974B can be used on loadlocks or any vacuum chamber

requiringbothabsolutepressuremeasurementand

atmospheric switching capabilities.

Interface

The Series 970B has RS232, RS485, and EtherCAT

digital communications interface for setup of transducer

parameters and to provide real time pressure

measurement.

All Series 970B transducers have an analog pressure

output of 0.5VDC/decade that can be interfaced to external

analogequipmentforpressurereadoutorcontrol.Other

analog outputs and curves can be selected via the digital

user interface.

The Series 970B has up to three mechanical relays which

can be used for process control, examples are interlocking

valves or pumps.

The Series 970B have standard 15 pin HD SUBD

connector and an analog output voltage pressure signal

of 0.5VDC/decade. It can also emulate analog voltage

outputs from a variety of other vacuum transducers. The

emulation feature can be used to upgrade and replace

other vendors’ gauges in OEM applications without

changing system software. Contact MKS technical support

for details.

The optional integrated

touch-screen display is

user configurable; the user

can change pressure units,

orientation and has access to set

point parameters as well as gas

type. The display also indicates

the status of the available set

point relays. Displayed pressure

reading from individual sensors

or combined reading can be

seen from >5 meters away on

the high contrast display.

Sensor and transducer measurement ranges

971B

972B

974B

The transducers are available with an optional IP54

(NEMA 3) rated enclosure.

The user changeable cold cathode anode module and

screen offers easy serviceability without disassembling of

transducer electronics.

Pin

RS232/485 15 pin Sub-D

EtherCAT 15 pin Sub-D

RJ45 EtherCAT IN/OUT

1

RS485 (-)/RS232 transmit

NC

TX+

2

RS485 (+)/RS232 receive

NC

TX-

3

Power (+)

Input Power (+) 9 to 24 VDC

RX+

4

Power (-)

Power Return -

NC

5

Analog Output (+) abs.

Signal Output +

NC

6

Analog Output (-)

Signal Common

RX-

7

Relay #1 NO

NC

NC

8

Relay #1 Common

NC

NC

9

Relay #1 NC

NC

10

Relay #2 NC

NC

11

Relay #2 Common

NC

12

Relay #2 NO

NC

13

Relay #3 NC

(971B only - cold cathode enable)

NC

14

Relay #3 Common

NC

15

Relay #3 NO

Chassis Ground

PinOuts —

Three (3) set point relays and dual Aout, 15 pin D Subminiature and RJ45

EtherCAT IN/OUT Connectors