Ordering Information

Series 970B - 10/18

© 2009-2018 MKS Instruments, Inc.

All rights reserved.

MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.

patented technology, licensed by Beckhoff Automation GmbH, Germany.

* Recommended on inlet flange of 972B/974B to protect sensors from particulates when used in harsh environments.

Other filter sizes available upon request.

MKS Instruments, Inc.

Pressure & Vacuum Measurement Solutions

6450 Dry Creek Parkway

Longmont, CO 80503

Tel:

303.652.4400

MKS Instruments, Inc.

Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810

Tel:

978.645.5500

Tel:

800.227.8766 (in USA)

Web: www.mksinst.com

0

4

972B

3

2

1

Ordering Code Example: 972B-21034

Code

Configuration

971B UniMag

971B-

972B DualMag

972B-

974B QuadMag

974B-

Flange

NW25 KF

2

2 ¾” CF

7

NW40 KF

9

Interface

RS232

1

RS485

2

EtherCAT/Analog

7 (972B only)

Analog Out

Standard MKS

0

Connector Relays

SubD 15pin HD male/no relay

2

SubD 15pin HD male/3 relays

3 (not available with EtherCAT)

SubD 15pin HD male/3 relays/Dual Aout (piezo differential) - 974B only

4 (not available with EtherCAT)

SubD 15pin HD male/3 relays/Dual Aout (Absolute) - 972B/974B only

5 (not available with EtherCAT)

Enclosure Sealing

0

IP54/Viton

2

Standard/Viton sealing/display

4 (not available with EtherCAT)

Accessories

PDR900 Single Channel Controller, RS232/485, US Power Cord

PDR900-12-US

Cable, PDR900 to 970B, 10 ft (3M), RS232

100013620

Cable, PDR900 to 970B, 10 ft (3M), RS485

100013671

Replacement Cold Cathode Anode Module

970BNT-KIT

NW25KF Centering Ring with 4µm Filter and Viton O-ring*

100014515

NW40KF Centering Ring with 4µm Filter and Viton O-ring*

100014520

Dimensional Drawings —

Note: Unless specified, dimensions are nominal values in inches (millimeters referenced).

Flange

A

NW 25 KF

3.70 (94)

NW 40 KF

3.86 (98)

2 3/4'' CF

4.49 (114)

Flange

A

NW 25 KF

4.90 (124)

NW 40 KF

4.77 (121)

2 3/4'' CF

5.40 (137)

RS232/RS485 Version

EtherCAT Version