Series 970B

COLD CATHODE TRANSDUCER FAMILY

The Series 970B is a family of compact, low cost, general-purpose transducers that utilize

Torr. In addition to its small size, broad range and lower cost, the Series 970B can be

operated via digital communication or as an autonomous analog unit.

Features & Benefits

• Smallfootprintdesignprovidesacompact

transducer solution saving tool real estate

• Singletransducerprovidesawide

atmosphere (972B and 974B models),

eliminating the need for multiple gauges

• TheMEMSbasedMicroPiranisensor

in the 972B and 974B allows low auto

cold cathode turn-on pressure (user

for enhanced reliability

• Thecoldcathodeanodemoduledesignis

user serviceable to decrease downtime

and save external repair costs

• Easeofoperationviaanalogoutput,

• MicroPiraniisautomaticallyzeroed

during pump down cycle for improved

accuracy (972B and 974B models)

• Mountableinanyorientationforease

of use and flexibility of design

• Simplifiedinterfaceviaasingle

smoothed analog output that combines

the individual sensor measurements

• Threeuserconfigurablerelaysforprocess

control

• Alternateanalogoutputandelectrical

connectors available to match other

vendors’ gauges and facilitate an easy

upgrade

• CanbeusedwiththePDR900controller

for easy set up

• Optionalintegratedtouch-screendisplay

available for local pressure indication, etc.

Applications

The Series 970B Transducers are compact, low cost measurement solutions for vacuum

Series 970B transducers makes them ideal for system integrators looking to reduce footprint

and enable miniaturization. Applications include:

• Analyticalequipment

(mass spectrometer control)

• Scanningelectronmicroscopes

• Coatingsystems

• Semiconductorloadlockpressurecontrol

• Generalvacuumbasepressure

measurement