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SM9D Datasheet(PDF) 3 Page - Silicon Microstructures, Inc.

Part # SM9D
Description  Uncompensated SO-16 Pressure Sensor
PDF  9 Pages
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Manufacturer  SMI [Silicon Microstructures, Inc.]
Direct Link  https://www.si-micro.com/
Logo SMI - Silicon Microstructures, Inc.

SM9D Datasheet(HTML) 3 Page - Silicon Microstructures, Inc.

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+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
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DOC # 40DS9509.04
Silicon Microstructures, Inc. 2001-2018. All rights reserved
SM9G, SM9D Series
www.si-micro.com
No.
Characteristic
Symbol
Minimum
Typical
Maximum
Units
10a
Span (0.15 PSI) (g)
VSPAN
30
45
60
mV
10b
Span (0.60, 1.5 PSI) (g)
50
90
120
11
Zero Offset
VZERO
-55
0
+55
mV
12
TC Span (g, i, j)
TCS
-0.24
-0.21
-0.15
%FS/°C
13
TC Zero Offset (g, i, j)
TCZ
0 to +100
µV/°C
14
TC Resistance (h, i, j)
TCR
0.17
0.20
0.23
%RB/°C
15
Topside Linearity (g, j)
NL
-0.15
±0.1
0.15
%FS
16
Backside Linearity (g, j)
-0.35
±0.2
0.35
17
Bridge Resistance
RB
4.0
5.0
6.0
kΩ
OPERATING CHARACTERISTICS TABLE
All parameters are specified at VDD = 5.0 V DC SUPPLY at 25°C, unless otherwise noted.
Notes:
g. Tested on a sample basis.
h. The device can only be driven with the supply voltage connected to the pins as shown.
i. Determined by measurements taken between -40°C and 85°C.
j. Defined as best fit straight line.
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