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SM9D Datasheet(PDF) 5 Page - Silicon Microstructures, Inc.

Part # SM9D
Description  Uncompensated SO-16 Pressure Sensor
PDF  9 Pages
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Manufacturer  SMI [Silicon Microstructures, Inc.]
Direct Link  https://www.si-micro.com/
Logo SMI - Silicon Microstructures, Inc.

SM9D Datasheet(HTML) 5 Page - Silicon Microstructures, Inc.

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+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
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DOC # 40DS9509.04
Silicon Microstructures, Inc. 2001-2018. All rights reserved
SM9G, SM9D Series
www.si-micro.com
Single Vertical Porting Configuration: SM9G-BG
Page 5
Notes:
•
All dimensions in units of [mm].
•
Moisture Sensitivity Level (MSL): Level 3
•
Positive pressure applied to the port is resulting in a positive change in output. Pressure is applied to the backside of the die.
Single Vertical Porting Configuration: SM9G-BG



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