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DOC # 40DS9509.04

Silicon Microstructures, Inc. 2001-2018. All rights reserved

SM9G, SM9D Series

www.si-micro.com

Typical Operation

PIN

Description

Type

Value

3

+Vexc/Vsub

Power

Up to 5 V

5

-Sig

Analog Out

-

13

-Vexc

Power

Ground

14

+Sig

Analog Out

-

SM9D Package Pin-Out (Dual Horizontal & Dual Vertical)

NOTES:

•

Do not connect to NC pins

•

Applies dual ported vertical and horizontal packages

•

Positive pressure applied to the topside of the die [T] is resulting in a positive change in output.

Typical Operation

PIN

Description

Type

Value

3

+Vexc/Vsub

Power

Up to 5 V

5

+Sig

Analog Out

-

13

-Vexc

Power

Ground

14

-Sig

Analog Out

-

SM9G Package Pin-Out (Single Vertical)

NOTES:

•

Do not connect to NC pins

•

Applies to single ported vertical package

•

Positive pressure applied to the port results in a positive change in output. Pressure is applied to the backside of the die.

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