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SM5321 Datasheet(PDF) 3 Page - Silicon Microstructures, Inc.

Part # SM5321
Description  Gauge & Differential Pressure Sensors
PDF  11 Pages
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Manufacturer  SMI [Silicon Microstructures, Inc.]
Direct Link  https://www.si-micro.com/
Logo SMI - Silicon Microstructures, Inc.

SM5321 Datasheet(HTML) 3 Page - Silicon Microstructures, Inc.

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Silicon Microstructures, Inc. 2001-2017. All rights reserved
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
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DOC # 40DS5960.05
SM5221, SM5321 & SM5421 Series
www.si-micro.com
OPERATING CHARACTERISTICS TABLE All parameters are specified at Vdd = 3.3 V DC supply voltage at 25oC,
unless otherwise noted.
Notes:
e. The accuracy specification applies over all operating conditions. This specification includes the combination of linearity, repeatability, and
hysteresis errors over pressure, temperature, and voltage.
f. Maximum lifetime zero pressure offset shift < ±1%FS based on 1000 hours of HTOL , TC and THB testing.
g. For less demanding applications, devices with relaxed accuracy specifications are available
No.
Characteristic
Symbol
Minimum
Typical
Maximum
Units
10
Supply Voltage*
VDD
3.0
3.3
3.6
V
4.75
5.0
5.25
11
Pressure Output @ PMIN
OUTMIN
1,638
Counts
12
Pressure Output @ PMAX
OUTMAX
14,745
Counts
13
Full Scale Span
FSP
13,107
Counts
14
Resolution
14
Bits
15
Accuracy (e, f, g)
ACC
-1
+1
%FS
Page 3
*Custom calibration pressures and voltages are available to meet specific customer demands.
Calibrated Pressure Ranges
No.
Device Type
PMIN (psi)
PMAX (psi)
Comment
16
SM5221 – Gauge
0
+0.8 to +2.49
17
SM5321 – Differential
-2.49 to -0.8
+0.8 to +2.49
Absolute value of PMIN must match absolute value of PMAX
18
SM5421 -- Asymmetric
-2.49 to +0.8
-0.8 to +2.49
Delta between PMAX and PMIN must be at least 0.8 psi



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