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DOC # 40DS5960.05

SM5221, SM5321 & SM5421

Gauge & Differential Pressure Sensors

Low Pressure

Digital Sensor

DESCRIPTION

The SM5221, SM5321 & SM5421 Series is a digital, low pressure

MEMS sensor family offering state-of-the-art pressure transducer

technology and CMOS mixed signal processing technology to

produce a digital, fully conditioned, multi-order pressure and

temperature compensated sensor in JEDEC standard SOIC-16

package with a dual vertical porting option. It is available in both

compound gage or differential pressure configurations. With the

dual porting, a vacuum-gage measurement is possible to minimize

altitude errors due to changes in ambient pressure.

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FEATURES

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Pressure ranges from 0.8 to 2.49 psi; gauge, differential and

asymmetric outputs

•

Accuracy: ±1% full scale

•

14-bit digital, pressure calibrated and temperature compensated

output

•

•

•

Insensitive to mounting orientation

•

Robust JEDEC SOIC-16 package for automated assembly

•

Manufactured according to ISO9001 and ISO/TS 16949 standards

Combining the pressure sensor with a signal-conditioning ASIC in a

single package simplifies the use of advanced silicon micro-machined

pressure sensors. The pressure sensor can be mounted directly on a

standard printed circuit board and a high level, calibrated pressure

signal can be acquired from the digital interface. This eliminates the

need for additional circuitry, such as a compensation network or

microcontroller containing a custom correction algorithm.

Customer-specified pressure ranges and supply voltages are

available.

The SM5221, SM5321 & SM5421 is shipped in sticks or tape & reel.

Medical

Industrial

Consumer

Sleep Apnea

Airflow Measurement

Sports Equipment

CPAP

Pneumatic Gauges

Appliances

Ventilators

Pressure Switches

Gas Flow Instrumentation

Safety Cabinets

Air Flow Monitors

Life Sciences

Negative Pressure Wound Therapy

Gas Flow Instrumentation