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27

45

131

167

170

175

169

0

61

DOC # 40DS5960.05

SM5221, SM5321 & SM5421 Series

www.si-micro.com

SOIC-16 (C) Vertical Package Dimensions

Notes:

•

Moisture Sensitivity Level (MSL): Level 3

•

Wetted materials: Silicon, glass, copper, silicone, epoxy, mold compound.

•

Tolerance on all dimensions ±0.13 mm unless otherwise specified.

•

[B] is tube connected to bottom side of sensor die.

•

[T] is tube connected to top side of sensor die. Topside pressure is positive pressure. An increase in topside pressure will result in an

increase in sensor output

Lot Number Identification

Page 7

All dimensions are in mm