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AD5520 Datasheet(PDF) 11 Page - Analog Devices |
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AD5520 Datasheet(HTML) 11 Page - Analog Devices |
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11 / 20 page ![]() REV. A AD5520 –11– THEORY OF OPERATION The AD5520 is a single channel per pin parametric measurement unit (PPMU) for use in semiconductor automatic test equip- ment. It contains programmable modes to force a pin voltage and measure the corresponding current (FVMI), force current mea- sure voltage (FIMV), force current measure current (FIMI), and force voltage measure voltage (FVMV). The PPMU can force or measure a voltage from –11 V to +11 V. It can force or measure a current over four ranges: 4 µA, 40 µA, 400 µA, and 4 mA. The addition of an external driver allows two extended ranges. The device provides a force sense capability to ensure accuracy at the tester pin. A guard output is also available to drive the shield of a force/sense pair. The AD5520 has an on-board window comparator that pro- vides two bits of useful information, DUT too low or too high. Also provided on the chip is clamp circuitry that will flag via CLHDETECT and CLLDETECT if the voltage applied to FIN or across the DUT has exceeded the voltage applied to CLL and CLH. On chip is clamp circuitry that clamps the output of the force amplifier if the voltage at MEASIOUT and MEASVOUT exceeds CLL and CLH. INTERFACE The AD5520 PPMU is controlled via a number of digital inputs, which are discussed in detail in the following sections. All inputs are TTL compatible. CS is used to select the device while STB (active low input) latches data available on the other digital inputs and updates any required digital outputs. The rising edge of STB triggers sequence inputs. The remaining digital inputs control the function of the PMU—which measure mode it is in, which com- pensation capacitor is used, and the selected current range. Standby Mode The AD5520 may be placed into standby mode via the standby logic input. In this mode, the force amplifier is disconnected from the force input (FIN), the switch in series with the force output pins, FOHx, is opened, and the current measure amplifier is dis- connected from the sense resistors. The voltage measure amplifier is still connected across the DUT, so DUT voltage measure- ments may still be made while in standby mode. Figure 3 shows the configuration of the PMU while in standby mode. Table I. Standby Mode STANDBY Function Low Normal Force Mode High Standby Mode DAC MEASIHx MEASIL MEASVH MEASVL FOHx RS DUT FIN MEASIOUT MEASVOUT G = 16 G = 1 Figure 3. PMU in Standby Mode Force Voltage or Force Current FSEL is an input that determines whether the PPMU forces a voltage or current. Table II. FSEL Function FSEL Function Low Voltage Force and Current Clamp with MEASIOUT Voltage High Current Force and Voltage Clamp with MEASVOUT Voltage Measured Parameter MEASOUT is a muxed output that tracks the sensed parameter, MSEL connects it to the output of either the current sense amplifier or the voltage sense amplifier, depending on which is the measured parameter of interest. The MEASOUT pin will be connected back to an ADC to allow the measured value to be converted to a digital code. Table III. MEASOUT Connected to Voltage or Current MSEL Function Low MEASOUT = DUT Voltage High MEASOUT = DUT Current The MEASOUT pin may also be made high impedance through the MOEB logic input. Table IV. MOEB Allows MEASOUT to Go High Impedance MOEB Function Low Enable MEASOUT Output High Hi-Z MEASOUT Output |
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