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AN2350 Datasheet(PDF) 17 Page - STMicroelectronics |
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AN2350 Datasheet(HTML) 17 Page - STMicroelectronics |
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17 / 41 page ![]() AN2350 Hardware and mechanical equipments 17/41 3 Hardware and mechanical equipments 3.1 The Dual DC motor and the power stage Each arm of the wafer handler is controlled by a dual DC motor (see Figure 17 on page 24); they are mounted in the same chassis with two armatures which rotate on the same axis and having concentric drive hubs, as shown in the Figure 12. Figure 11. The Dual DC motor The upper armature is connected to the outer drive hub and controls the shoulder (link 1), while the lower armature is connected to the inner drive hub and controls the elbow (link 2) through a drive belt with a transmission ratio of 1/2. |
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