Baratron® Capacitance

Manometer Chart

A very partial list of applications for the 600 series of products include:

•

All semiconductor thin-film processes such as etching and ashing, chemical vapor deposition, physical vapor

deposition, oxidation, diffusion, and implantation.

•

Production of electronic displays such as LCDs, plasma displays, and CRTs.

•

Manufacturing of advanced ceramics and metals for aerospace and transportation.

•

Automated leak test systems for industrial and scientific use.

•

Sterilization and freeze-drying of biopharmaceuticals, foods, medical implants, and surgical instruments.

•

Analytical and metrology instruments such as mass spectrometers, high-precision balances, calibration

standards, and other analytical tools.

•

Production of data storage components such as laser diodes, magnetic read/write heads, and storage platters.

MKS offers many products within the 600-series family with different attributes, capabilities, and performance. A quick

summary of these models is below, followed by individual descriptions of each product and its major applications.

Notes:

*Other units of measurement available; contact factory.

**0.02 Torr range available only on 45°C models.

Product

Family

Sensor

Output

Operating

Temperature

Primary Full Scale

Ranges - Torr*

Secondary Full Scale

Range - Torr*

Electrical

Connector

Relay

Switches

622C

Standard

0-10VDC analog

Unheated

1 to 1,000

Not available

Terminal Block

No

623F

Standard

0-10VDC analog

Unheated

10 to 1,000

Not available

Terminal Block

Yes

624F

Standard

0-10VDC analog

45°C

1 to 20,000

Not available

15-pin

D-subminiature

Yes

625F

Standard

0-10VDC analog

100°C

1 to 20,000

Not available

15-pin

D-subminiature

Yes

626C

Standard

0-10VDC analog

Unheated

0.1 to 1000

Not available

15-pin

D-subminiature

No

627F

Standard

0-10VDC analog

45°C

0.02 to 20,000

Not available

15-pin

D-subminiature

No

628F

Standard

0-10VDC analog

100°C

0.05 to 20,000

Not available

15-pin

D-subminiature

No

629F

Standard

0-10VDC analog

45°C or 100°C

0.02 to 1,000**

Not available

9-pin

D-subminiature

No

631D

Standard

0-10VDC analog

150°C or 200°C

1 to 1,000

Not available

15-pin

D-subminiature

Optional

D24F

Standard

0-10VDC analog

45°C

10 to 1,000

2x, 5x, or 10x lower

than primary range

15-pin

D-subminiature

Yes

D25F

Standard

0-10VDC analog

100°C

10 to 1,000

2x, 5x, or 10x lower

than primary range

15-pin

D-subminiature

Yes

D27F

Standard

0-10VDC analog

45°C

10 to 1,000

2x, 5x, or 10x lower

than primary range

15-pin

D-subminiature

No

D28F

Standard

0-10VDC analog

100°C

10 to 1,000

2x, 5x, or 10x lower

than primary range

15-pin

D-subminiature

No

E27F

Etch Baffle

0-10VDC analog

45°C

0.02 to 100

Not available

15-pin

D-subminiature

No

E28F

Etch Baffle

0-10VDC analog

100°C

0.05 to 100

Not available

15-pin

D-subminiature

No

E29F

Etch Baffle

0-10VDC analog

45°C or 100°C

0.02 to 100**

Not available

9-pin

D-subminiature

No