Capacitance Manometers

631D Heated (150°C or 200°C) Absolute

Baratron® Capacitance Manometer

The 631D is a heated capacitance manometer, operating

at either 150°C or 200°C. It was specifically designed for

the most difficult semiconductor and biopharmaceutical

applications known today, such as nitride CVD and DI-steam

sterilization. It is completely self-contained, requiring only

±15VDC input power and providing a 0-10VDC analog output

signal that is linear with pressure. It is about 40% smaller in

its physical size and draws 40% less electrical power than

earlier products, making it an ideal choice to upgrade existing

systems with 100°C or higher temperature capacitance

manometers. In standard form, it includes LED indicators for

“At Temperature” and “Heater Failure”. The product is also

offers the option of two (2) internally-mounted, independently-

adjustable electromechanical trip relays that can be set to

open or close at any pressure between 0.1% and 100% of the

manometer’s measurement range. Full Scale measurement

ranges from 1 to 1000 Torr (1.33 to 1333 mbar) are available.

E27F, E28F, and E29F Heated Absolute

Baratron® Capacitance Manometers with

Etch Sensor

For certain semiconductor and industrial manufacturing

processes, heating the Baratron capacitance manometer

to 100°C is sometimes not enough to prevent deposition

of process byproducts that cause drift in the manometer’s

output and undesirable process excursions. For these difficult

processes, MKS offers a heated capacitance manometer

with a patented etch baffle in its sensor, which forces

condensable process byproducts to deposit on a baffle before

reaching the sensor’s diaphragm measurement element.

This greatly reduces the amount of zero drift in the Baratron

capacitance manometer, which in turn improves the overall

Cost of Ownership and process accuracy. These products

are available in Full Scale measurement ranges as low as

0.02 Torr (0.27 mbar), and with either 15-pin D-subminiature

(E27F and E28F) or 9-pin D-subminiature (E29F) electrical

connectors.

D24F, D25F, D27F, and D28F Heated Dual-Range

Absolute Baratron® Capacitance Manometers

These products are designed for processes where the

customer wishes to measure and control the process over

a very wide pressure range. Standard single-range Baratron

capacitance manometers can be used in pressure control

systems down to at least 0.1% of their Full Scale range, but

at pressures below 0.05% of Full Scale, the analog output of

the manometer is low enough that some pressure controllers

may not be able to resolve the signal correctly. The dual-range

Baratron capacitance manometers solve that problem by

adding a second output signal that is 2x, 5x, or 10x higher

in gain than the primary range, which increases the analog

output signal by that same amount. These Baratron

capacitance manometers are heated to either 45°C or 100°C,

are available with or without internally-mounted process

relays, and have a single 15-pin D-subminiature electrical

connector. Primary pressure ranges from 10 to 1000 Torr

(13 to 1333 mbar) are available, and the secondary pressure

range is 2x, 5x, or 10x less than the primary range.