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628F Datasheet(PDF) 13 Page - MKS Instruments.

Part # 628F
Description  600 Series Analog Capacitance Manometers
PDF  16 Pages
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

628F Datasheet(HTML) 13 Page - MKS Instruments.

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Ordering Information
622C, 623F, 626C, 627F, 628F, E27F, and E28F
627F
1
B
B
11T
C
Configuration
Ordering Code Example: 627F11TBC1B
Code
Example
Absolute Capacitance Manometers
Unheated; terminal block connector; standard sensor
622C
Unheated; relays; terminal block; standard sensor
623F
Unheated; 15-pin D-connector; standard sensor
626C
45°C sensor temp; 15-pin D-connector; standard sensor
627F
100°C sensor temp; 15-pin D-connector; standard sensor
628F
45°C sensor temp; 15-pin D-connector; etch sensor
E27F
100°C sensor temp; 15-pin D-connector; etch sensor
E28F
Pressure Ranges Full Scale (Torr)
0.02 (available on 627F and E27F)
U2T
0.05 (available on 627F, E27F, 628F, E28F)
U5T
0.10 (not available on 622C, 623F)
.1T
0.25 (not available on 622C, 623F)
RET
1 (not available on 623F)
01T
2 (not available on 623F)
02T
10
11T
20
21T
100
12T
200 (available on 623F, 627F, 628F)
22T
500 (not available on E27F, E28F)
52T
1000 (not available on E27F, E28F)
13T
2000 (available on 627F, 628F)
23T
5000 (available on 627F, 628F)
53T
10,000 (available on 627F, 628F)
14T
15,000 (available on 627F, 628F)
RBT
20,000 (available on 627F, 628F)
24T
25,000 (available on 627F, 628F)
RCT
Fittings
1/2” OD (12.7 mm) tubulation
A
Swagelok 8 VCR, female
B
1.33” OD Conflat, rotatable1
C
NW16-KF2
D
NW25-KF2
Q
Swagelok 8 VCO, female
E
2.75” OD Conflat, rotatable1
L
Accuracy (% of Reading)
0.12% (627F and E27F 1 Torr range and higher)
C
0.15% (627F and E27F in 0.25, 0.10, 0.05 Torr ranges)
D
0.25% (622C, 623F, 626C, 628F, E28F, and 0.02 Torr 627F and E27F)
E
0.50% (628F and E28F in 0.25, 0.10, 0.05 Torr ranges)
F
Options (not available on 622C, 623F, 626C)
Standard configuration, vertical calibration
1
(627F, E27F, 628F, E28F only; 1 Torr and higher)
Temperature/Heater status, vertical calibration
2
(627F, E27F, 628F, E28F only; 1 Torr and higher)
Standard configuration, horizontal calibration (E27F, E28F only; < 1 Torr)
5
Temperature/Heater status, horizontal calibration (E27F, E28F only; < 1 Torr)
6
Connector (not available on 622C, 623F, 626C)
15-pin D-connector, thread locks (627F, E27F, 628F, E28F only)
B
15-pin D-connector, slide locks (627F, E27F, 628F, E28F only)
P
1Available only on ranges of 1000 Torr and less.
2Available only on ranges of 5000 Torr and less, and 2000 and 5000 Torr ranges require use of an MKS overpressure ring.
3Other relay settings and logic available; contact MKS Applications for assistance.



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