| Electronic Components Datasheet Search |
|
628F Datasheet(PDF) 13 Page - MKS Instruments. |
|
|
|||||||||||||||||||||||||||||
628F Datasheet(HTML) 13 Page - MKS Instruments. |
|
13 / 16 page ![]() Ordering Information 622C, 623F, 626C, 627F, 628F, E27F, and E28F 627F 1 B B 11T C Configuration Ordering Code Example: 627F11TBC1B Code Example Absolute Capacitance Manometers Unheated; terminal block connector; standard sensor 622C Unheated; relays; terminal block; standard sensor 623F Unheated; 15-pin D-connector; standard sensor 626C 45°C sensor temp; 15-pin D-connector; standard sensor 627F 100°C sensor temp; 15-pin D-connector; standard sensor 628F 45°C sensor temp; 15-pin D-connector; etch sensor E27F 100°C sensor temp; 15-pin D-connector; etch sensor E28F Pressure Ranges Full Scale (Torr) 0.02 (available on 627F and E27F) U2T 0.05 (available on 627F, E27F, 628F, E28F) U5T 0.10 (not available on 622C, 623F) .1T 0.25 (not available on 622C, 623F) RET 1 (not available on 623F) 01T 2 (not available on 623F) 02T 10 11T 20 21T 100 12T 200 (available on 623F, 627F, 628F) 22T 500 (not available on E27F, E28F) 52T 1000 (not available on E27F, E28F) 13T 2000 (available on 627F, 628F) 23T 5000 (available on 627F, 628F) 53T 10,000 (available on 627F, 628F) 14T 15,000 (available on 627F, 628F) RBT 20,000 (available on 627F, 628F) 24T 25,000 (available on 627F, 628F) RCT Fittings 1/2” OD (12.7 mm) tubulation A Swagelok 8 VCR, female B 1.33” OD Conflat, rotatable1 C NW16-KF2 D NW25-KF2 Q Swagelok 8 VCO, female E 2.75” OD Conflat, rotatable1 L Accuracy (% of Reading) 0.12% (627F and E27F 1 Torr range and higher) C 0.15% (627F and E27F in 0.25, 0.10, 0.05 Torr ranges) D 0.25% (622C, 623F, 626C, 628F, E28F, and 0.02 Torr 627F and E27F) E 0.50% (628F and E28F in 0.25, 0.10, 0.05 Torr ranges) F Options (not available on 622C, 623F, 626C) Standard configuration, vertical calibration 1 (627F, E27F, 628F, E28F only; 1 Torr and higher) Temperature/Heater status, vertical calibration 2 (627F, E27F, 628F, E28F only; 1 Torr and higher) Standard configuration, horizontal calibration (E27F, E28F only; < 1 Torr) 5 Temperature/Heater status, horizontal calibration (E27F, E28F only; < 1 Torr) 6 Connector (not available on 622C, 623F, 626C) 15-pin D-connector, thread locks (627F, E27F, 628F, E28F only) B 15-pin D-connector, slide locks (627F, E27F, 628F, E28F only) P 1Available only on ranges of 1000 Torr and less. 2Available only on ranges of 5000 Torr and less, and 2000 and 5000 Torr ranges require use of an MKS overpressure ring. 3Other relay settings and logic available; contact MKS Applications for assistance. |
|
|
Link URL |
| Does ALLDATASHEET help your business so far? [ DONATE ] |
About Alldatasheet | Advertisement | Contact us | Privacy Policy | Link to Datasheet | Link Exchange | Manufacturer List All Rights Reserved©Alldatasheet.com |
| Russian : Alldatasheetru.com | Korean : Alldatasheet.co.kr | Spanish : Alldatasheet.es | French : Alldatasheet.fr | Italian : Alldatasheetit.com Portuguese : Alldatasheetpt.com | Polish : Alldatasheet.pl | Vietnamese : Alldatasheet.vn Indian : Alldatasheet.in | Mexican : Alldatasheet.com.mx | British : Alldatasheet.co.uk | New Zealand : Alldatasheet.co.nz |
|
Family Site : ic2ic.com |
icmetro.com |