*24VDC input power available for some models; contact MKS Applications for assistance.

**Not all fittings available for all pressure ranges; contact MKS Applications for assistance.

Capacitance Manometers

622C

623F

626C

627F

628F

629F

624F

Unheated,

Terminal Block

Connector

Unheated, Terminal

Block Connector,

Relays

Unheated,

15-pin

D-connector

Heated to 45°C,

15-pin

D-connector

Heated to 100°C,

15-pin

D-connector

Heated to 45°C or

100°C, 9-pin

D-connector

Heated to 45°C,

15-pin D-connector,

Relays

Full Scale Pressure Ranges - Torr (mbar)

1, 2, 10, 20, 100, 500

and 1000

(1.33 to 1333)

10, 20, 100, 500 and

1000

(13.3 to 1333)

0.1, 0.25, 1, 2, 10, 20,

100, 500 and 1000

(0.13 to 1333)

0.02, 0.05, 0.1, 0.25, 1,

2, 10, 20, 100, 1000,

2000, 5000, 10000,

15000, and 20000

(0.026 to 26315)

0.05, 0.1, 0.25, 1, 2, 10,

20, 100, 1000, 2000,

5000, 10000, 15000,

and 20000

(0.066 to 26315)

0.02, 0.05, 0.1, 0.25, 1,

2, 10, 20, 100, 1000,

2000, 5000, 10000,

15000, and 20000

(0.026 to 26315)

1, 10, 20, 100, 500,

1000, 2000, 5000,

10000, 15000, and

20000 (1.33 to 26315)

Accuracy - % of Reading

0.25%

0.25%

0.25%

0.12% for 1 Torr and

above; 0.15% for 0.25,

0.1, and 0.05 Torr;

0.25% for 0.02 Torr

0.25% for 1 Torr and

above; 0.50% for below

1 Torr

For 45°C models: 0.12%

for 1 Torr and above;

0.15% for 0.25, 0.1, and

0.05 Torr.

For 100°C models:

0.25% for 1 Torr and

above; 0.50% for below

1 Torr.

0.12%

Resolution - % of Full Scale

0.001%

0.001%

0.001%

0.001% for 0.10 Torr

and higher; 0.002% for

<0.10 Torr.

0.001% for 0.10 Torr

and higher; 0.002% for

<0.10 Torr.

0.001% for 0.10 Torr

and higher; 0.002% for

<0.10 Torr.

0.001%

Zero Temperature Coefficient - % FS/°C

0.005% for 10 Torr

and higher; 0.010%

for 2 Torr; and 0.015%

for 1 Torr

0.005%

0.005% for 10 Torr

and higher; 0.010%

for 2 Torr; and 0.015%

for 1 Torr

0.002% for 1 Torr and

higher; 0.005% for 0.1

and 0.25 Torr; 0.015%

for 0.05 Torr; 0.030%

for 0.02 Torr

0.002% for 1 Torr and

higher; 0.010% for 0.1

and 0.25 Torr; 0.015%

for 0.05 Torr

Same as 627F and 628F

specifications for 45°C

and 100°C temperatures

0.002%

Span Temperature Coefficient -

% Reading/°C

0.04%

0.04%

0.04%

0.02%

0.02%

0.02%

0.02%

Ambient Operating Temperature

0 to 50°C

0 to 50°C

0 to 50°C

15 to 40°C

15 to 50°C

45°C models: 15 to 40°C

100°C models: 15 to

50°C.

15 to 40°C

Warmup Time

30 minutes

30 minutes

30 minutes

2 hours for 1 Torr and

higher; 4 hours for

<1 Torr

2 hours for 1 Torr and

higher; 4 hours for

<1 Torr

2 hours for 1 Torr and

higher; 4 hours for

<1 Torr

2 hours for 1 Torr and

higher; 4 hours for

<1 Torr

Overpressure Limit

45 psia

45 psia

45 psia

45 psia

45 psia

45 psia

45 psia

Materials Exposed to Process Gases

(excluding optional fittings)

Inconel and Incoloy

alloys

Inconel and Incoloy

alloys

Inconel and Incoloy

alloys

Inconel and Incoloy

alloys

Inconel and Incoloy

alloys

Inconel and Incoloy

alloys

Inconel and Incoloy

alloys

6.3

6.3

6.3

6.3

6.3

6.3

6.3

Input Power Requirements*

±15VDC (±5%)

@ 35 mA

±15VDC (±5%)

@ 75 mA

±15VDC (±5%)

@ 35 mA

±15VDC (±5%)

@ 250 mA max

±15VDC (±5%)

@ 500 mA max

Same as 627F and 628F

specifications for 45°C

and 100°C temperatures

±15VDC (± 5%)

@ 400 mA max

Output Signal

0-10VDC into > 10

k-ohms

0-10VDC into > 10

k-ohms

0-10VDC into > 10

k-ohms

0-10VDC into > 10

k-ohms

0-10VDC into > 10

k-ohms

0-10VDC into > 10

k-ohms

0-10VDC into > 10

k-ohms

Trip Relay Specifications

Not Applicable

(2) independent relays,

SPDT contacts rated

at 1 amp @ 30VDC

or 0.5 amp @ 30 VAC

resistive. Each relay

adjustable from 0.1%

to 100% of FS range.

12.5 k ohm max

source impedance.

Not Applicable

Not Applicable

Not Applicable

Not Applicable

(2) independent relays,

SPDT contacts rated

at 1 amp @ 30VDC

or 0.5 amp @ 30 VAC

resistive. Each relay

adjustable from 0.1%

to 100% of FS range.

12.5 k ohm max source

impedance.

Electrical Connector(s)

5-post terminal strip

(2) terminal strips,

(1) 5-post and

(1) 8-post"

15-pin D-subminiature

with thread locks

15-pin D-subminiature

with thread locks

15-pin D-subminiature

with thread locks

9-pin D-subminiature

with thread locks

15-pin D-subminiature

with thread locks,

15-pin D-subminiature

with slide locks,

terminal block adapter,

15-pin D-subminiature,

filtered

Connection Fitting - Standard

1/2" OD (12.7 mm)

tubulation

1/2" OD (12.7 mm)

tubulation

1/2" OD (12.7 mm)

tubulation

1/2" OD (12.7 mm)

tubulation

1/2" OD (12.7 mm)

tubulation

1/2" OD (12.7 mm)

tubulation

1/2" OD (12.7 mm)

tubulation

Connection Fittings - Optional**

8 Female VCR, 1.33"

OD Conflat, NW16-KF,

8 Female VCO, 2.75"

OD Conflat, NW25-KF

8 Female VCR, 1.33”

OD Conflat, NW16-KF,

8 Female VCO, 2.75”

OD Conflat, NW25-KF

8 Female VCR, 1.33" OD

Conflat, NW16-KF,

8 Female VCO, 2.75" OD

Conflat, NW25-KF

8 Female VCR, 1.33" OD

Conflat, NW16-KF,

8 Female VCO, 2.75" OD

Conflat, NW25-KF

8 Female VCR, 1.33" OD

Conflat, NW16-KF,

8 Female VCO, 2.75" OD

Conflat, NW25-KF

8 Female VCR, 1.33" OD

Conflat, NW16-KF,

8 Female VCO, 2.75" OD

Conflat, NW25-KF

8 Female VCR, 1.33"

OD Conflat, NW16-KF

Compliance

CE

CE

CE

CE

CE

CE

CE

Catalog Options

None

None

None

Temperature/Heater

Status LEDs; 15-pin

D-connector

with slide locks

Temperature/Heater

Status LEDs; 15-pin

D-connector

with slide locks

Heater Status

Indication;

External Zero Adjust

(not available on 0.02

Torr/45°C or

0.05 Torr/100°C

configurations

15-pin D-connector

with slide locks;

Terminal Block Adaptor