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628F Datasheet(PDF) 4 Page - MKS Instruments. |
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628F Datasheet(HTML) 4 Page - MKS Instruments. |
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4 / 16 page ![]() 622C, 623F and 626C Unheated Absolute Baratron® Capacitance Manometers The 622C, 623F and 626C Baratron capacitance manometers are unheated, and thus are the most economical of all of the 600 series family of products. They are available in Full Scale pressure/vacuum ranges from 0.1 to 1000 Torr (and metric equivalents) and are suited for many industrial, electronic, and research applications. The 622C has a terminal block electrical connector without relays, the 626C uses a 15-pin D-subminiature electrical connector without relays, and the 623F product adds two (2) independently-adjustable trip relays to control external equipment. The 627F, 628F, and 629F are heated capacitance manometers that are much less affected by ambient temperature changes than unheated Baratron capacitance manometers. Heating the sensor also reduces or eliminates the possibility of process byproducts depositing inside the manometer to cause drift, which can have a significant effect on system availability and repeatability. They are available in lower Full Scale pressure ranges than unheated products, which permits their use in more demanding processes. All of the models are internally regulated to their specified operating temperature; no external controllers, cables, or sensors are needed. The 627F and 628F operate at 45°C and 100°C respectively, and have a 15-pin D-subminiature electrical connector. They also have an option for “Heater Status” and “At Temperature” LED indicators and relay contact. The 629F can be configured to operate at either temperature, and uses a 9-pin D-subminiature electrical connector for “drop-in” compatibility with many competitive products. The 629F also offers an optional external zero set capability, allowing its zero to be set remotely – a major advantage in many process tools that do not permit easy access to the capacitance manometer. The 45°C 627F offers Full Scale pressure/ vacuum ranges from 0.02 to 20,000 Torr (0.026 mbar to 26.3 bar), and the 100°C 628F has pressure/vacuum ranges from 0.05 to 20,000 Torr (0.066 mbar to 26.3 bar). 627F, 628F, and 629F Heated Absolute Baratron® Capacitance Manometers These heated capacitance manometers are identical to the 627F and 628F Baratron capacitance manometers except that they add two (2) internally-mounted, independently- adjusted electromechanical relays that can be set to open or close at any pressure from 0.1% to 100% of the product’s Full Scale measurement range. These relays can be used to control external equipment, such as isolation valves, other high vacuum gauges (such as hot-filament ionization gauges), drive motors, etc. They are available in Full Scale measurement ranges from 10 to 1000 Torr (13 to 1333 mbar). 624F and 625F Heated Absolute Baratron® Capacitance Manometers with Integral Process Control Relays |
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