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628F Datasheet(PDF) 4 Page - MKS Instruments.

Part # 628F
Description  600 Series Analog Capacitance Manometers
PDF  16 Pages
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Manufacturer  MKS [MKS Instruments.]
Direct Link  https://www.mksinst.com/
Logo MKS - MKS Instruments.

628F Datasheet(HTML) 4 Page - MKS Instruments.

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622C, 623F and 626C Unheated Absolute
Baratron® Capacitance Manometers
The 622C, 623F and 626C Baratron capacitance manometers
are unheated, and thus are the most economical of all of the
600 series family of products. They are available in Full Scale
pressure/vacuum ranges from 0.1 to 1000 Torr (and metric
equivalents) and are suited for many industrial, electronic,
and research applications. The 622C has a terminal block
electrical connector without relays, the 626C uses a 15-pin
D-subminiature electrical connector without relays, and the
623F product adds two (2) independently-adjustable trip
relays to control external equipment.
The 627F, 628F, and 629F are heated capacitance
manometers that are much less affected by ambient
temperature changes than unheated Baratron capacitance
manometers. Heating the sensor also reduces or eliminates
the possibility of process byproducts depositing inside the
manometer to cause drift, which can have a significant effect
on system availability and repeatability. They are available in
lower Full Scale pressure ranges than unheated products,
which permits their use in more demanding processes. All of
the models are internally regulated to their specified operating
temperature; no external controllers, cables, or sensors are
needed. The 627F and 628F operate at 45°C and 100°C
respectively, and have a 15-pin D-subminiature electrical
connector. They also have an option for “Heater Status” and
“At Temperature” LED indicators and relay contact. The 629F
can be configured to operate at either temperature, and
uses a 9-pin D-subminiature electrical connector for “drop-in”
compatibility with many competitive products. The 629F also
offers an optional external zero set capability, allowing its
zero to be set remotely – a major advantage in many process
tools that do not permit easy access to the capacitance
manometer. The 45°C 627F offers Full Scale pressure/
vacuum ranges from 0.02 to 20,000 Torr (0.026 mbar to 26.3
bar), and the 100°C 628F has pressure/vacuum ranges from
0.05 to 20,000 Torr (0.066 mbar to 26.3 bar).
627F, 628F, and 629F Heated Absolute
Baratron® Capacitance Manometers
These heated capacitance manometers are identical to the
627F and 628F Baratron capacitance manometers except
that they add two (2) internally-mounted, independently-
adjusted electromechanical relays that can be set to open
or close at any pressure from 0.1% to 100% of the product’s
Full Scale measurement range. These relays can be used
to control external equipment, such as isolation valves,
other high vacuum gauges (such as hot-filament ionization
gauges), drive motors, etc. They are available in Full Scale
measurement ranges from 10 to 1000 Torr (13 to 1333 mbar).
624F and 625F Heated Absolute
Baratron® Capacitance Manometers with
Integral Process Control Relays



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