KAI-2001 datasheet(18/36 Pages) ONSEMI

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KAI−2001

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Global Peak to Peak Non-Uniformity

This test is performed with the imager illuminated to

a level such that the output is at 80% of saturation

(approximately 32,000 electrons). Prior to this test being

performed the substrate voltage has been set such that the

charge capacity of the sensor is 40,000 electrons. The sensor

is partitioned into 192 sub regions of interest, each of which

is 100 by 100 pixels in size. See Figure 17. The average

signal level of each of the 192 sub regions of interest (ROI)

is calculated. The signal level of each of the sub regions of

interest is calculated using the following formula:

Signal of ROI[i]

+ (ROI Average in ADU *

* Horizontal Overclock Average in ADU) @

@ mV per Count

Where i = 1 to 192. During this calculation on the 192 sub

regions of interest, the maximum and minimum signal levels

are found. The global peak to peak uniformity is then

calculated as:

Global Uniformity

Max. Signal

* Min. Signal

Active Area Signal

Units : % pp

Center Non-Uniformity

This test is performed with the imager illuminated to

a level such that the output is at 80% of saturation

(approximately 32,000 electrons). Prior to this test being

performed the substrate voltage has been set such that the

charge capacity of the sensor is 40,000 electrons. Defects are

excluded for the calculation of this test. This test is

performed on the center 100 by 100 pixels of the sensor (see

Figure 17). Center uniformity is defined as:

Center ROI Uniformity

+ 100 @

Center ROI Standard Deviation

Center ROI Signal

Center ROI Signal = Center ROI Average − H. Overclock Average

Units : % rms

Dark Field Defect Test

This test is performed under dark field conditions.

The sensor is partitioned into 192 sub regions of interest,

each of which is 100 by 100 pixels in size (see Figure 17).

In each region of interest, the median value of all pixels is

found. For each region of interest, a pixel is marked

defective if it is greater than or equal to the median value of

that region of interest plus the defect threshold specified in

“Defect Definitions” section.

Bright Field Defect Test

This test is performed with the imager illuminated to

a level such that the output is at 80% of saturation

(approximately 32,000 electrons). Prior to this test being

performed the substrate voltage has been set such that the

charge capacity of the sensor is 40,000 electrons.

The average signal level of all active pixels is found.

The bright and dark thresholds are set as:

Dark Defect Threshold = Active Area Signal

@ Threshold

Bright Defect Threshold = Active Area Signal

@ Threshold

The sensor is then partitioned into 192 sub regions of

interest, each of which is 100 by 100 pixels in size (see

Figure 17). In each region of interest, the average value of

all pixels is found. For each region of interest, a pixel is

marked defective if it is greater than or equal to the median

value of that region of interest plus the bright threshold

specified or if it is less than or equal to the median value of

that region of interest minus the dark threshold specified.

Example for major bright field defective pixels:

• Average value of all active pixels is found to be

416 mV (32,000 electrons).

• Dark defect threshold: 416 mV ⋅ 15% = 62.4 mV.

• Bright defect threshold: 416 mV ⋅ 15% = 62.4 mV.

• Region of interest #1 selected. This region of interest is

pixels 1, 1 to pixels 100, 100.

♦ Median of this region of interest is found to be

416 mV.

♦ Any pixel in this region of interest that is

≥ (416 + 62.4 mV) 478.4 mV in intensity will be

marked defective.

♦ Any pixel in this region of interest that is

≥ (416 − 62.4 mV) 353.6 mV in intensity will be

marked defective.

• All remaining 191 sub regions of interest are analyzed

for defective pixels in the same manner.

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