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ESRF-ESF Datasheet(PDF) 4 Page - ES Systems

Part # ESRF-ESF
Description  Resistive MEMS Gas Flow Sensor
PDF  14 Pages
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Manufacturer  ES [ES Systems]
Direct Link  https://esenssys.com/
Logo ES - ES Systems

ESRF-ESF Datasheet(HTML) 4 Page - ES Systems

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4. Flow Sensor Specifications
Characteristic
Absolute
Unit
Min.
Typ.
Max.
Flow direction
Unidirectional / bidirectional
-
Full scale ranges
Unidirectional
Bidirectional
10, 15, 20, 50, 100, 200, 300
±10, ±15, ±20, ±50, ±100, ±200, ±300
ln/min1
Flow cut2
1.0
%FS3
Max measured flow
-330
-
330
ln/min
Calibration gas
Clean, Dry Air4
-
Operating temp. range5
-20[-4]
-
+85[+185]
o
C[oF]
Compensated temp range6
0[+32]
-
+50[+122]
o
C[oF]
Operating pressure
1.0
-
1.3
bara
Proof pressure
-
-
1.7
bara
Effective resolution
12
-
-
bits
Response time
-
35
-
msec
Total error band7,8 (<10%FS)
-
±0.125
-
%FS
Total error band7 (>10%FS)
-
±1.25
-
%RD9
Accuracy10,11 (<10%FS)
-
±0.125
-
%FS
Accuracy10 (>10%FS)
-
±1.0
-
%RD
Orientation sensitivity12
-
0.001
-
%FS/o
Long term stability13
-
-
±0.1
%FSS14
1
In normal liters per minute at 0oC and 1013 mbar
2
Flow measured below this point will always indicate 0 ln/min
3
% of the full scale
4
Other, non-aggressive, gases available upon request
5
The temperature range over which the sensor will produce an output proportional to flow (Non condensing
humidity)
6
The temperature range over which the sensor will produce an output proportional to flow within the specified
performance limits. Note that for valid datasheet values, ambient and gas temperatures must be the same
7
The maximum deviation from ideal transfer function over the entire compensated temperature and flow range.
Includes all errors due to offset, full scale span, accuracy, thermal effect on offset, thermal effect on span and thermal
hysteresis
8
For the 10 ln/min FS flow option only, TEB for flows <10%FS is ±0.5%FS
9
% of the reading value
10
The maximum deviation in output from a Best Fit Straight Line (BFSL) fitted to the output measured over the flow
range at 21oC [69.8oF]. Includes all errors due to flow non-linearity, flow hysteresis, non-repeatability and noise
11
For the 10 ln/min FS flow option only, accuracy for flows <10%FS is ±0.5%FS
12
Added measurement error due to orientation deviation from the optimal (calibration) position
13
Accelerated Life Test Profile: 100hours at 90oC
14
Full Scale Span (FSS): The algebraic difference between the output signal measured at the maximum (Umax) and the
minimum (Umin) limits of the flow range



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