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ESRF-ESF Datasheet(PDF) 5 Page - ES Systems

Part # ESRF-ESF
Description  Resistive MEMS Gas Flow Sensor
PDF  14 Pages
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Manufacturer  ES [ES Systems]
Direct Link  https://esenssys.com/
Logo ES - ES Systems

ESRF-ESF Datasheet(HTML) 5 Page - ES Systems

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5. Flow Range Specifications (ln/min)
Flow Range
Flow Range
Unit
Pressure
Drop @ FS
Unit
Umin1
Umax (Digital Output)2
Umax (Analog Output)
010NL
0.1
11
ln/min
0.07
mbar
10
015NL
0.15
16.5
ln/min
0.15
mbar
15
020NL
0.2
22
ln/min
0.17
mbar
20
050NL
0.5
55
ln/min
1
mbar
50
100NL
1
110
ln/min
2.4
mbar
100
200NL
2
220
ln/min
8.6
mbar
200
300NL
3
330
ln/min
18.4
mbar
300
6. Temperature Sensor Specifications
Characteristic
Absolute
Unit
Min.
Typ.
Max.
Full Scale range
0 [+32]
-
+50 [+122]
o
C[oF]
Accuracy
-
o
C
0.5
-
Resolution
8
-
-
bits
1
Flows below Umin will always indicate 0 ln/min
2
In order to improve the quality of the flow measurements, the digital output features an extra 10% flow range from
the nominal FS flow.



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