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ESRF-ESF Datasheet(PDF) 6 Page - ES Systems

Part # ESRF-ESF
Description  Resistive MEMS Gas Flow Sensor
PDF  14 Pages
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Manufacturer  ES [ES Systems]
Direct Link  https://esenssys.com/
Logo ES - ES Systems

ESRF-ESF Datasheet(HTML) 6 Page - ES Systems

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Datasheet ESRF-ESF
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When performing transaction with the ESRF-ESF sensors the returned data is always MSB
first. Flow is represented as a 16-bit, two’s complement number. The lowest number in the
Flow Data Register is 0x8000 (-32768 in Decimal) and the highest number is 0x7FFF (32767 in
Decimal). In unidirectional ESF sensors output data higher than 0x7FFF must be ignored.
Calibrated flow (in SLPM) can be calculated using the following formula:
An example of unidirectional flow:
Flow Register Byte [0] = 0x3F
Flow Register Byte [1] = 0xFF
Using the formula (Eq 1) and assuming a full scale flow of 200 ln/min, the calculated output
should be 109.9932 ln/min
Eq. 1
An example of bidirectional flow:
Flow Register Byte [0] = 0xFC
Flow Register Byte [1] = 0x18
Using the formula (Eq.1) and assuming a full scale flow of 200 ln/min, the calculated output
should be –6.7139 ln/min
7. Data & Register Description
The ESRF-ESF sensors provide measurement and status data. The measurement data are
flow rate and temperature whilst the status data refer to the sensors factory programed
serial number. The data are stored in specific data registers as described below. The readout
is performed by using multibyte read transactions.
ADDRESS
REGISTER NAME
TYPE
DEFAULT VALUE
(Hex)
MNEMONIC
0x00
Calibrated Flow Byte 1
R
Variable
CAL_DATA[15:8]
Calibrated Flow Byte 2
R
Variable
CAL_DATA[7:0]
Flow Data Register [0x00]



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