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Agilent 4156C Semiconductor Parameter Analyzer

MPSMU (Medium Power SMU) Specifications

Voltage Range, Resolution, and Accuracy (MPSMU)

Voltage

Range

Set

Reso.

Set Accuracy

Meas.

Reso.

Meas. Accuracy

Max.

Current

±2 V

100 μV ±(0.03%+900 μV+0.3×Iout)

2 μV

±(0.02%+700 μV+0.3×Iout)

100 mA

±20 V

1 mV

±(0.03%+4 mV+0.3×Iout)

20 μV

±(0.02%+2 mV+0.3×Iout)

100 mA

±40 V

2 mV

±(0.03%+7 mV+0.3×Iout)

40 μV

±(0.02%+3 mV+0.3×Iout)

1

±100 V

5 mV

±(0.04%+15 mV+0.3×Iout)

100 μV

±(0.03%+5 mV+0.3×Iout)

2

1 100 mA (Vout ≤20 V), 50 mA (20 V<Vout ≤40 V)

2 100 mA (Vout ≤20 V), 50 mA (20 V<Vout ≤40 V), 20 mA (40 V<Vout≤100 V)

Current Range, Resolution, and Accuracy (MPSMU)

Current

Range

Set

Reso.

Set Accuracy

Meas.

Reso.

Meas. Accuracy

Max. V

±1 nA

100 fA

±(0.5%+3 pA+2 fA×Vout)

10 fA

±(0.5%+3 pA+2 fA×Vout)

100 V

±10 nA

1 pA

±(0.5%+7 pA+20 fA×Vout)

10 fA

±(0.5%+5 pA+20 fA×Vout)

100 V

±100 nA 10 pA

±(0.12%+50 pA+200 fA×Vout) 100 fA

±(0.1%+30 pA+200 fA×Vout)

100 V

±1 μA

100 pA ±(0.12%+400 pA+2 pA×Vout)

1 pA

±(0.1%+200 pA+2 pA×Vout)

100 V

±10 μA

1 nA

±(0.12%+5 nA+20 pA×Vout)

10 pA

±(0.1%+3 nA+20 pA×Vout)

100 V

±100 μA 10 nA

±(0.12%+40 nA+200 pA×Vout) 100 pA

±(0.1%+20 nA+200 pA×Vout

100 V

±1 mA

100 nA ±(0.12%+500 nA+2 nA×Vout)

1 nA

±(0.1%+300 nA+2 nA×Vout)

100 V

±10 mA

1 μA

±(0.12%+4 μA+20 nA×Vout)

10 nA

±(0.1%+2 μA+20 nA×Vout)

100 V

±100 mA 10 μA

±(0.12%+50 μA+200 nA×Vout) 100 nA

±(0.1%+30 μA+200 nA×Vout)

1

1 100 V (Iout ≤20 V), 40 V (20 mA<Iout≤50 mA), 20 V (50 mA<Iout≤100 mA)

Vout is the output voltage in volts. Iout is the output current in amps.

For example, accuracy specifications are given as ±% of set/measured

value (0.1%) plus offset value (30 pA+200 fA×Vout) for the 100 nA range.

The offset value consists of a fixed part determined by the set/

measurement range and a proportional part that is multiplied by Vout.

Output Terminal/Connection:

Single triaxial connector, non-Kelvin

(no remote sensing)

Voltage/Current Compliance

(Limiting):

The SMU can limit output voltage or

current to prevent damaging the device

under test.

Voltage: 0 V to ±100 V

Current: ±1 pA to ±100 mA

Compliance Accuracy: Same as the current

(voltage) settling accuracy.

MPSMU Supplemental Information:

Typical voltage source output

resistance: 0.3 Ω

Voltage measurement input

resistance/current source output resis-

Current compliance setting accuracy for

opposite polarity:

1 nA to 10 nA range: V/I setting accuracy

±12% of range

100 nA to 100 mA range: V/I setting

accuracy ±2.5% of range

100

50

20

-20

-50

-100

-100

-40 -20

20 40

100

Current (mA)

Voltage (V)

MPSMU measurement

and output range

VSU (Voltage Source Unit)

Specifications

VSU Output Range:

Voltage

Range

Meas.

Reso.

Meas. Accuracy

±20 V

1 mV

1 Specification is applicable under no load current.

Max. Output Current: 100mA

VSU Supplemental Information:

Output resistance: 0.2 Ω (typical)

Maximum load capacitance: 10 μF

Maximum slew rate: 0.2 V/μs

Current limit: 120 mA (typical)

Output Noise: 1 mV rms (typical)

VMU (Voltage Monitor Unit)

Specifications

VMU Differential Mode Range,

Resolution, and Accuracy:

Diff V

Range

Meas.

Reso.

Meas.

Accuracy

±0.2 V

0.2 μV

±(0.03%+10 μV+0.3 μV×Vi)

±2 V

2 μV

±(0.02%+100 μV+3 μV×Vi)

Max. Common Mode Voltage: ± 20 V

Note: Vi is the input voltage of VMU2 in volts.

For example, accuracy specifications are given as ±%

of set/measured value (0.02%) plus offset value (100

μV+3 μV×Vi) for the 2 V range. The differential mode

offset value consists of a fixed part determined by the

measurement range and a proportional part that is

multiplied by Vi.

VMU Measurement Range,

Resolution, and Accuracy:

Voltage

Range

Meas.

Reso.

Meas.

Accuracy

±2 V

2 μV

±(0.02%+200 μV)

±20 V

20 μV

±(0.02%+1 mV)

VMU Supplemental Information:

Input Impedance: ≥1 GΩ

Input leakage current (@0 V): ≤500 pA

Measurement noise: 0.01% of range (p-p)

(typical) when integration time is 10 PLC

Differential mode measurement noise:

0.005% of range (p-p) (typical) when

integration time is short.

VSU and VMU specifications are common to both the 4155C and 4156C